Title:
AIR IMPURITY MONITOR APPARATUS
Document Type and Number:
Japanese Patent JP3865941
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an air impurity monitor apparatus simple to handle and low in cost capable of automatically rapidly and continuously measuring the concn. of fine particles or impurities in an atmosphere.
SOLUTION: An air impurity monitor apparatus has a hermetically closable impurity collecting container 1 having an almost erected barrier wall 2 therein, a compressed pure air jet pipe arranged so that the jet orifice thereof is turned toward the barrier wall 2 in the impurity collecting container 1 to eject compressed pure air, the ultrapure water introducing pipe 5 and a sample atmosphere introducing pipe 6 arranged to the pressure reducing region in the vicinity of the jet orifice 3 of the compressed pure air jet pipe, the drain piping 8 provided to the impurity collecting container 1, the mist discharge port 7 opened in the vicinity of the barrier wall 2 of the impurity collecting container 1 and an impurity concn. measuring apparatus receiving the mist discharged from the mist discharge port 7 to rapidly dry the same and suspending impurities in the mist to measure the concn. thereof.
Inventors:
Yukinori Yanagi
Application Number:
JP20095398A
Publication Date:
January 10, 2007
Filing Date:
July 15, 1998
Export Citation:
Assignee:
Nomura Micro Science Co., Ltd.
International Classes:
G01N15/06; G01N1/00; (IPC1-7): G01N15/06; G01N1/00
Domestic Patent References:
| JP1195341A | ||||
| JP63238445A | ||||
| JP9089726A | ||||
| JP9145616A | ||||
| JP5264435A |
Attorney, Agent or Firm:
Saichi Suyama