Title:
AIR JETTING APPARATUS AND AIR JETTING WIDTH ADJUSTMENT METHOD
Document Type and Number:
Japanese Patent JP2004188321
Kind Code:
A
Abstract:
To provide an air jetting apparatus the slit width of which can be kept even and properly and easily changed, and an adjustment method of the air jetting width.
In a first wall member 62, a projection part 58 is projected in the vicinity of the lower end part of, for example, a first lower member 57 in the longitudinal direction of an air knife. Also, a support member 59 is projected in the lower part of a first installation member 56 in the longitudinal direction of the air knife 50. A screw hole is formed in the projection part 58 and a screw 64 is screwed in the screw hole and is brought into contact with the projection part 58. The slit width can be adjusted by sagging the lower end part 57b by fastening or loosening the screw 64.
Inventors:
SHINOZAKI MASAYA
NAGATA HIROSHI
SADA TETSUYA
NAGATA HIROSHI
SADA TETSUYA
Application Number:
JP2002359699A
Publication Date:
July 08, 2004
Filing Date:
December 11, 2002
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G02F1/13; B05B1/04; F26B21/00; G02F1/1333; H01L21/027; H01L21/304; (IPC1-7): B05B1/04; G02F1/13; G02F1/1333; H01L21/027; H01L21/304
Attorney, Agent or Firm:
Junichi Omori