Title:
トリアジントリオン構造を有する反射防止膜
Document Type and Number:
Japanese Patent JP4126556
Kind Code:
B2
Inventors:
Takahiro Kishioka
Application Number:
JP2004115391A
Publication Date:
July 30, 2008
Filing Date:
April 09, 2004
Export Citation:
Assignee:
Nissan Chemical Industry Co., Ltd.
International Classes:
G03F7/11; C08F26/06; C09D5/00; C09D139/04; H01L21/027
Domestic Patent References:
| JP62156110A |
Foreign References:
| WO2002048226A2 | ||||
| WO2004034435A2 |