To provide an apparatus for firing a ceramic substrate, and to provide a method for firing a ceramic substrate using the same.
The apparatus for firing a ceramic substrate includes: a firing setter for mounting a ceramic substrate thereon; a firing pressing plate located at an upper part of the ceramic substrate; and ceramic supporting columns which are arranged between the firing setter and the firing pressing plate so that a certain interval may be formed between the firing pressing plate and the ceramic substrate and each has a thickness shrinkage during firing larger than that of the ceramic substrate. When a large ceramic substrate is fired under pressure, the ceramic substrate is fired without causing warp by using the ceramic columns each having a shrinkage higher than that of the ceramic substrate and the firing pressing plate.
PARK YUN HWI
LYOO SOO-HYUN
JP2005306672A | 2005-11-04 | |||
JPH04144970A | 1992-05-19 | |||
JPH0967169A | 1997-03-11 | |||
JPS5832075A | 1983-02-24 | |||
JPS62128973A | 1987-06-11 | |||
JPH10291865A | 1998-11-04 |
Takafumi Oshima