PURPOSE: To simplify a manufacturing and assembling work by fixing one set of two sets of holding tables for holding a substrate by one piece each by vacuum chuck, turning one set, positioning it on a fixing base, and thereafter, releasing the vacuum chuck.
CONSTITUTION: Holding tables 6, 23 of a substrate are placed on a fixing base 24, the holding table 23 is fixed to the fixing table 24, and the holding table 6 is turned around a revolving shaft 7 so that it can face the holding table 23. The holding tables 6, 23 attract substrates 2, 1 inserted into recessed parts 18, 17 of the holding table by grooves 15, 14, tubes 22, 21 and vacuum chuck levers 8, 9. A space 4 is installed in advance to the substrate 2. The holding table 6 is turned and mated with the holding base table 23, and positioning is executed by projecting pins 10, 11, a positioning projected part 16 and recessed holes 12, 13. Subsequently, the chuck is released by the vacuum chuck levers 8, 9. In this way, the position is executed easily, an assembling work is rationalized, and man- hours are decreased.
YOKOYAMA KAZUO
TANIGUCHI SEIICHI
ISHIGAME TAKESHI
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