To provide a method of removal of atomic hydrogen in which any atomic hydrogen can be removed and an apparatus therefor.
The method of adsorption removal of atomic hydrogen includes a desorption step for desorbing atomic hydrogen adsorbed by an inconel by heating the inconel and an adsorption removal step for adsorbing and removing atomic hydrogen in an objective gas by exposing the inconel to the objective gas containing atomic hydrogen. The apparatus for adsorption removal of atomic hydrogen is provided with an adsorption removal part comprising the inconel and a heating mechanism for heating the inconel and the inconel from which atomic hydrogen is desorbed is used to be exposed in the objective gas containing atomic hydrogen.
COPYRIGHT: (C)2008,JPO&INPIT
Ryo Izumi
Hiroshi Tsurumaki
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