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Title:
BARRIER WALL FORMING METHOD FOR GAS DISCHARGE PANEL
Document Type and Number:
Japanese Patent JP2000067742
Kind Code:
A
Abstract:

To form a highly accurate barrier wall without generating chips or break-away, in a bulkhead forming method for a gas discharge panel.

In forming a bulkhead 22 for partitioning a discharge space of a gas discharge panel using sand-blast, the bulkhead is formed in a set of processes including a process in which a bulkhead material layer 22a is arranged on a glass substrate 11, which includes a glass material having a softening point lower than a given baking temperature for burning a sand-blast mask by heating and a glass material having a softening point higher than the baking the temperature, and a process in which the mask 30 made of a resist layer having a given pattern of opening is formed on the bulkhead material layer 22a, a sand-blast process is performed via the mask 30, and then the bulkhead material layer 22a and the mask 30 are simultaneously heated to burn the mask 30.


Inventors:
TOKAI AKIRA
TOYODA OSAMU
BETSUI KEIICHI
Application Number:
JP23069698A
Publication Date:
March 03, 2000
Filing Date:
August 17, 1998
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G03F7/34; B24C11/00; G09F9/30; H01J9/02; H01J11/12; H01J11/22; H01J11/24; H01J11/26; H01J11/34; H01J11/36; H01J11/38; H01J11/40; H01J11/42; (IPC1-7): H01J9/02; B24C11/00; G03F7/34; G09F9/30; H01J11/02
Attorney, Agent or Firm:
Teiichi