To provide a conveyor having high durability even under such environment (vacuum, high temperature and high cleanliness) as the inside of an etching chamber in a semiconductor manufacturing process.
A conveyor is provided with an endless spring belt 2 for conveying a semiconductor wafer 1, a roller 3 to be brought in contact with the belt 2, and a bearing part 6 for rotatably supporting the roller 3 to a fixed shaft 5. The roller 3 is formed of polymide or Copra (condensed polynuclear aromatic) resin into a ring body shape. The bearing 6 is a sliding bearing in which the inside diameter surface of the roller 3 and the outside diameter surface of the fixed shaft 5 are brought in contact with each other, and a crystalline PTFE lubricating coating is formed on the contact parts of both surfaces.
MAIWA TSUTOMU
KONDO HIROMITSU
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