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Patent Searching and Data


Title:
BIPOLAR TRANSISTOR DEVICE
Document Type and Number:
Japanese Patent JPH02189929
Kind Code:
A
Abstract:

PURPOSE: To reduce the area of a transistor, and to lower junction capacitance and parasitic resistance by forming a leading out electrode around a collector region, shaping the internal base region of the electrode and forming an emitter region inside the leading-out electrode connected to the base region.

CONSTITUTION: A base region 15 is shaped inside the leading-out electrode 51 of a collector region, and an emitter region 16 is formed inside the leading out electrode 7 of the base region 15. Consequently, the emitter region 16 is shaped at a place separate only by a distance determined by the film thickness of a first insulating film 6, the base leading-out electrode 7 and a second insulating film 8 from a collector leading-out electrode 5. As a result, the base leading out electrode 7 and an emitter leading-out electrode 18 are formed at positions separate at a constant distance in a self-alignment manner to the collector leading-out electrode 5. Accordingly, the area of a transistor is reduced, and junction capacitance and parasitic resistance are lowered.


Inventors:
KADOTA YASUO
Application Number:
JP920689A
Publication Date:
July 25, 1990
Filing Date:
January 18, 1989
Export Citation:
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Assignee:
NEC CORP
International Classes:
H01L29/73; H01L21/331; H01L21/8222; H01L27/06; H01L29/732; (IPC1-7): H01L21/331; H01L27/06; H01L29/73
Attorney, Agent or Firm:
Suzuki Akio