Title:
Board processing equipment, control program and control method
Document Type and Number:
Japanese Patent JP6352824
Kind Code:
B2
Abstract:
According to one embodiment, a substrate processing device includes a nozzle that discharges chemical to a circumferential edge portion of a substrate; and a rotation processing unit that rotates the substrate. The substrate processing device also includes a determination unit and a rotation number control unit. The determination unit determines whether or not a discharging position of the chemical by the nozzle arrived at an outer circumferential portion of the substrate from a position on an outer side of the substrate. The rotation number control unit controls a rotation number of the substrate based on a determination result by the determination unit.
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Inventors:
Tomoyuki Takeishi
Application Number:
JP2015011156A
Publication Date:
July 04, 2018
Filing Date:
January 23, 2015
Export Citation:
Assignee:
Toshiba Memory Corporation
International Classes:
H01L21/306; B05C11/08; B05D1/40; B05D3/00; H01L21/027; H01L21/304
Domestic Patent References:
| JP2002217159A | ||||
| JP2011073304A | ||||
| JP6124885A | ||||
| JP5028030U | ||||
| JP4188611A | ||||
| JP2001102287A | ||||
| JP4316315A | ||||
| JP2001000909A | ||||
| JP10027748A |
Attorney, Agent or Firm:
Sakai International Patent Office