Title:
基板処理装置
Document Type and Number:
Japanese Patent JP3623134
Kind Code:
B2
More Like This:
| JP2020205450 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSPORT DEVICE |
| JP2009021382 | HOLD ELEVATOR DEVICE |
Inventors:
Shinji Nagashima
Application Number:
JP26043199A
Publication Date:
February 23, 2005
Filing Date:
September 14, 1999
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; B65G49/07; H01L21/02; H01L21/31; H01L21/68; (IPC1-7): H01L21/31; B65G49/07; H01L21/02; H01L21/68
Domestic Patent References:
| JP7283164A | ||||
| JP4162526A | ||||
| JP10321698A | ||||
| JP10335219A | ||||
| JP7037827A |
Attorney, Agent or Firm:
Junichi Omori