Title:
基板搬送装置および基板搬送方法
Document Type and Number:
Japanese Patent JP4435443
Kind Code:
B2
Abstract:
A substrate transfer apparatus provided with a first substrate transfer mechanism having a first substrate holding hand which is movable while holding a substrate; and a second substrate transfer mechanism having a second substrate holding hand for receiving and transferring a substrate directly from and to the first substrate holding hand. The apparatus has a positioning mechanism disposed, in a moving passage of a substrate held by the first substrate holding hand, independently from the first substrate transfer mechanism, and having a positioning contact portion for regulating the movement of a substrate such that the substrate is positioned at a predetermined position on the first substrate holding hand.
Inventors:
Kenji Fujii
Hemp register
Ryuichi Hanyama
Tomoyuki Furumura
Hemp register
Ryuichi Hanyama
Tomoyuki Furumura
Application Number:
JP2001118581A
Publication Date:
March 17, 2010
Filing Date:
April 17, 2001
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B25J9/06; B25J15/08; H01L21/68; B65G49/06; B65G49/07; H01L21/677; H01L21/687
Domestic Patent References:
| JP430549A | ||||
| JP778859A | ||||
| JP7176596A | ||||
| JP6143177A | ||||
| JP1064975A | ||||
| JP2002299408A |
Attorney, Agent or Firm:
Mio Kawasaki
Inaoka cultivation
Inaoka cultivation