Title:
基板搬送装置
Document Type and Number:
Japanese Patent JP7071053
Kind Code:
B2
Abstract:
A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.
Inventors:
Caveney, Robert Tea
Gilchrist, Ulysses
Klapy Chef, Alexander
Gilchrist, Ulysses
Klapy Chef, Alexander
Application Number:
JP2016540517A
Publication Date:
May 18, 2022
Filing Date:
December 15, 2014
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
H01L21/677; B25J9/06; B65G49/07
Domestic Patent References:
| JP200662046A | ||||
| JP2011101912A |
Foreign References:
| WO2013040401A1 |
Attorney, Agent or Firm:
Asahina Patent Office