Title:
ＯＶＪＰプリンティングにおける位置調節のための静電容量センサ
Document Type and Number:
Japanese Patent JP7143112
Kind Code:
B2
Abstract:
Devices and techniques that include use of a capacitive sensor to permit an OVJP print head to orient itself relative to conductive or dielectric traces on a printing substrate are disclosed. Such a sensor enables real-time measurement and closed-loop control of print head position with respect to substrate traces. This enables, for example, micron scale resolution in a dimension transverse to printing while permitting both the substrate and movement of the OVJP tool to scale to larger sizes than are achievable using conventional techniques and systems.
Inventors:
Bruno Kelsshot
Ronald Stevens
Eric Costers
Ron Asges
William E. Quinn
Gregory McGraw
Ronald Stevens
Eric Costers
Ron Asges
William E. Quinn
Gregory McGraw
Application Number:
JP2018089399A
Publication Date:
September 28, 2022
Filing Date:
May 07, 2018
Export Citation:
Assignee:
Universal Display Corporation
International Classes:
C23C14/24; C23C14/12; H01L51/50; H05B33/10
Domestic Patent References:
| JP201324701A | ||||
| JP200953183A | ||||
| JP2017103213A |
Foreign References:
| US20170101711 | ||||
| US20130208036 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Koichi Hirota
Yoshihiro Ryu
Naoko Matsuda
Tadahiko Ito
Koichi Hirota
Yoshihiro Ryu
Naoko Matsuda