Title:
CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2019212992
Kind Code:
A
Abstract:
To provide a capacitive transducer with high power and high reliability.SOLUTION: The capacitance transducer comprises: a first electrode 8; a first insulating film 9 provided on the first electrode; and a vibrating film 6 provided by facing the first insulating film across a gap 10. The vibration film includes a second insulating film 11 and a second electrode 12 and is provided so that the second insulating film is positioned on the gap side. A concave portion 7 is provided on at least one of a surface of the first insulating film that contacts the gap and a surface of the second insulating film that contacts the gap.SELECTED DRAWING: Figure 1
Inventors:
AKIYAMA TAKAHIRO
Application Number:
JP2018105483A
Publication Date:
December 12, 2019
Filing Date:
May 31, 2018
Export Citation:
Assignee:
CANON KK
International Classes:
A61B8/14; H04R19/00; H04R31/00
Domestic Patent References:
| JP2006020313A | 2006-01-19 | |||
| JP2010004199A | 2010-01-07 | |||
| JP2009055474A | 2009-03-12 | |||
| JP2012095112A | 2012-05-17 |
Foreign References:
| US20070059858A1 | 2007-03-15 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa