Title:
CARBOXYLATE, CARBOXYLIC ACID GENERATOR, RESIST COMPOSITION AND PRODUCTION OF RESIST PATTERN
Document Type and Number:
Japanese Patent JP2022008153
Kind Code:
A
Abstract:
To provide a salt, an acid generator and a resist composition including the same that enable production of a resist pattern with excellent line edge roughness (LER).SOLUTION: For instance, a carboxylate of a structural formula below is presented.SELECTED DRAWING: None
Inventors:
KOMURO KATSUHIRO
ICHIKAWA KOJI
ICHIKAWA KOJI
Application Number:
JP2021096170A
Publication Date:
January 13, 2022
Filing Date:
June 08, 2021
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
C07D333/76; C07C62/06; C07C62/24; C07D321/10; C09K3/00; G03F7/004; G03F7/038; G03F7/039; G03F7/20
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation