Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP3389788
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To construct a charged particle beam device in a small size, enhance processability, and reduce the potential of accident.
SOLUTION: When a specimen 102 is to be replaced, a stage 103 is moved to a preliminary exhausting chamber 109, which is in vacuum isolated from a specimen observing chamber 101. The exhausting chamber 109 is put in the atmospheric pressure, and the specimen 102 is replaced. At this time, specimen 102 is installed directly to the stage 103. When the installment and replacement of the specimen 102 is finished, a door 110 is shut, and the exhausting chamber 109 is evacuated. When the degree of vacuum in the chamber 109 has attained the level of the observing chamber 101, the stage 103 is moved and the specimen 102 is carried to the observing position under the element 108 of an electron microscope.
Inventors:
Katsuhiko Sakai
Toshie Kurosaki
Tadashi Otaka
Otsuka Shinobu
Toshie Kurosaki
Tadashi Otaka
Otsuka Shinobu
Application Number:
JP23491796A
Publication Date:
March 24, 2003
Filing Date:
September 05, 1996
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/20; H01J37/18; (IPC1-7): H01J37/20
Domestic Patent References:
| JP416862U | ||||
| JP555442U | ||||
| JP6384868U |
Attorney, Agent or Firm:
Yasuo Sakuta
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