Title:
Charged particle beam device
Document Type and Number:
Japanese Patent JP6207884
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of achieving stable ion beam irradiation by suppressing impurity gas desorption in an emitter tip or in the periphery thereof.SOLUTION: A charged particle beam device comprises: a needle-like anode emitter tip; an extraction electrode arranged opposed to the emitter tip; a refrigerating machine including a cold head for cooling the emitter tip; a heat transfer unit which transfers heat from the refrigerating machine to the emitter tip; a driving mechanism which changes an angle of the emitter tip; and a vacuum partition wall for separating a first space in which the driving mechanism and the cold head of the refrigerating machine are arranged and a second space in which the emitter tip is arranged. The vacuum partition wall is connected to the emitter tip, and includes a movable unit which moves according to the movement of the driving mechanism.
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Inventors:
Shinichi Matsubara
Hiroyasu Shichi
Yoichi Ose
Yoshimi Kawanami
Hiroyasu Shichi
Yoichi Ose
Yoshimi Kawanami
Application Number:
JP2013119036A
Publication Date:
October 04, 2017
Filing Date:
June 05, 2013
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J27/26; H01J37/18; H01J37/28
Foreign References:
| WO2011001600A1 | ||||
| WO2010082466A1 | ||||
| WO2009147894A1 |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe