Title:
CHARGED PARTICLE BEAM IMAGE PROCESSING DEVICE AND CHARGED PARTICLE BEAM APPARATUS HAVING THE SAME
Document Type and Number:
Japanese Patent JP2023050960
Kind Code:
A
Abstract:
To provide a charged particle beam image processing device which can set a proper inspection region to an observation image including an edge of a line pattern.SOLUTION: A charged particle beam image processing device for performing image processing of an observation image generated by a charged particle beam apparatus comprises: an extraction unit which extracts an edge of a line pattern from an inspection region of the observation image; a division unit which divides the inspection region into sections having a plurality of numbers of measurement points; a measurement unit which measures line edge roughness in each section to generate the distribution data of the line edge roughness for each section; a calculation unit which calculates the line edge roughness in the entire inspection region to calculate a theoretical curve of the line edge roughness for each section; and a determination unit which determines whether or not the inspection region is proper on the basis of the comparison between the distribution data and the theoretical curve.SELECTED DRAWING: Figure 4
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Inventors:
HITOMI KEIICHIRO
KAWASAKI TAKAHIRO
KAWASAKI TAKAHIRO
Application Number:
JP2021161350A
Publication Date:
April 11, 2023
Filing Date:
September 30, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/22; H01J37/28
Attorney, Agent or Firm:
Polar Patent Attorney Corporation