Title:
半導体ウェーハの薬液誘導具及び半導体ウェーハの処理方法
Document Type and Number:
Japanese Patent JP6577419
Kind Code:
B2
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Inventors:
Satoshi Odashima
Application Number:
JP2016121764A
Publication Date:
September 18, 2019
Filing Date:
June 20, 2016
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
H01L21/304; H01L21/306
Domestic Patent References:
| JP2007005596A | ||||
| JP7245290A | ||||
| JP2001075266A | ||||
| JP2013179111A |
Attorney, Agent or Firm:
Eisuke Fujimoto
Masayoshi Kanda
Akio Miyao
Nobuyuki Baba
Masayoshi Kanda
Akio Miyao
Nobuyuki Baba