Title:
薬液供給装置
Document Type and Number:
Japanese Patent JP6984875
Kind Code:
B2
Abstract:
To provide a chemical liquid supply device capable of highly accurately and quickly measuring a small amount of raw chemical liquid, quickly diluting the small amount of raw chemical liquid with a diluent to prescribed concentration and smoothly supplying a diluted chemical liquid to a service place.SOLUTION: In a chemical liquid supply device having a measuring tank 12 and a dilution tank 13, a raw chemical liquid is transferred into the measuring tank 12 and measured as a standard raw chemical liquid amount when the liquid level of the raw chemical liquid reaches a prescribed value, one or a plurality of times of the raw chemical liquid amount are stored in the dilution tank according to a dilution rate, a diluent is supplied into the dilution tank and a diluted chemical liquid is prepared by diluting the raw chemical liquid, and the diluted chemical liquid is supplied to one or a plurality of service places. The measuring tank 12 is a long cylindrical body in a vertical direction and a cross sectional area thereof is made much smaller so that a small amount of standard raw chemical liquid can be highly accurately measured at the liquid level of the raw chemical liquid.SELECTED DRAWING: Figure 2
Inventors:
Haruyuki Ashida
Application Number:
JP2017197187A
Publication Date:
December 22, 2021
Filing Date:
October 10, 2017
Export Citation:
Assignee:
Technomate Co., Ltd.
International Classes:
B01F15/02; B01F1/00; B01F15/04; B01J4/02
Domestic Patent References:
| JP45008768Y1 | ||||
| JP10015379A | ||||
| JP2000317298A | ||||
| JP2010121689A |
Attorney, Agent or Firm:
Takashi Kumagai
Yu Takagi
Yu Takagi