Title:
CLEANING APPARATUS
Document Type and Number:
Japanese Patent JP2001145856
Kind Code:
A
Abstract:
To provide a liquid drop falling preventing mechanism of low production costs in order to prevent the dropping of a cleaning solution on an object in a spray type cleaning apparatus for cleaning the object having a large area and to eliminate defective adhesion by the adhesion of the cleaning solution.
By covering the lower part of a spray nozzle for ejecting the cleaning solution with a liquid drop falling preventing cover immediately after cleaning/air blowing, the dropping of the cleaning solution on the object is prevented completely.
Inventors:
SASAHARA YUTAKA
Application Number:
JP33128499A
Publication Date:
May 29, 2001
Filing Date:
November 22, 1999
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B08B3/02; F26B21/00; (IPC1-7): B08B3/02; F26B21/00
Attorney, Agent or Firm:
Kaneo Miyata (2 outside)