Title:
薄板状ワークの洗浄装置及び洗浄方法
Document Type and Number:
Japanese Patent JP3573450
Kind Code:
B2
More Like This:
Inventors:
Yoshihide Shibano
Application Number:
JP2001153920A
Publication Date:
October 06, 2004
Filing Date:
May 23, 2001
Export Citation:
Assignee:
Star Cluster Co., Ltd.
International Classes:
G02F1/13; B08B3/08; B08B3/12; C11D7/32; C11D7/50; H01L21/304; (IPC1-7): B08B3/12; B08B3/08; C11D7/32; C11D7/50; G02F1/13; H01L21/304
Domestic Patent References:
| JP2001017930A | ||||
| JP7185486A | ||||
| JP8257518A |
Attorney, Agent or Firm:
Osamu Kataoka