Title:
洗浄装置
Document Type and Number:
Japanese Patent JP3992894
Kind Code:
B2
More Like This:
Inventors:
Kenichi Mimori
Application Number:
JP2000004934A
Publication Date:
October 17, 2007
Filing Date:
January 13, 2000
Export Citation:
Assignee:
ALPS ELECTRIC CO.,LTD.
International Classes:
B08B7/00; H01L21/304
Domestic Patent References:
| JP3059223U | ||||
| JP6067016A | ||||
| JP11337714A | ||||
| JP5289039A | ||||
| JP5226262A | ||||
| JP8064565A | ||||
| JP9074079A |
Attorney, Agent or Firm:
Masatake Shiga
Sumio Tanai
Sumio Tanai