COATING DEVICE - DAINIPPON SCREEN MFG

Title:

COATING DEVICE

Document Type and Number:

Japanese Patent JP2000343015

Kind Code:

A

Abstract:

To obtain desired fixed film thickness by preventing the film from becoming thin in a coating starting region and successive stationary coating region when outer tank system is adopted.

This device is constituted so that a nozzle unit 6 and an outer coating liquid vessel 16 are connected to each other with a coating liquid supply pipe 12 and a constant quantity discharge/suction unit 18 is connected to the vicinity of the nozzle side end of the coating liquid supply pipe 12. At the same time or after a liquid pool is formed and prior to the coating, the constant quantity discharge/suction unit 18 sucks a prescribed quantity of the coating liquid from the coating liquid supply pipe 12 to give moving inertia previously to the coating liquid present in the coating liquid supply pipe 12 and the outer coating liquid vessel 16 before the coating is started.

Inventors:

OKUNO EIJI
OZAKI KAZUTO
KISE KAZUO

Application Number:

JP16091299A

Publication Date:

December 12, 2000

Filing Date:

June 08, 1999

Export Citation:

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Assignee:

DAINIPPON SCREEN MFG

International Classes:

B05D1/40; B05C3/18; B05C5/02; B05D7/00; G02F1/13; G03F7/16; H01L21/027; (IPC1-7): B05C3/18; B05D1/40; B05D7/00; G02F1/13; G03F7/16; H01L21/027

Attorney, Agent or Firm:

Etsushi Kotani (1 person outside)

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