To form an excellent coating film having slight variations in film thickness and without film breakage on the outer peripheral surface of a cylindrical substrate by feeding coating liquid to cause it to flow out to an annular outflow port surrounding the outer peripheral surface of the cylindrical substrate and causing it to flow on a hopper surface annually inclined and furthermore annually inclined upward inside to apply it.
Coating liquid 111 fed to a coating liquid slit 81 by a liquid transfer pump 61 flows out to an annular outflow port 91 installed so as to surround the outer peripheral surface of the cylindrical substrates 1A, 1B. A substrate raising means 13 vertically moves the annular outflow substrates 1A, 1B upward to a hopper surface 4. Since the hopper surface 4 forms a small annular coating liquid pool part 12 thereon near a lower end part P to form a stable coating liquid bead between the hopper surface 4 and the outer peripheral surfaces of the cylindrical substrates 1A, 1B, variations in film thickness in the radial and longitudinal directions by coating liquids are slight and coating film breakage is not encountered, and even coating liquid of large surface tension and poor coating property can be applied with stable bead.
UJIHARA JUNJI
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