Title:
COLD-CATHODE FIELD EMISSION ELECTRON GUN
Document Type and Number:
Japanese Patent JP2010251087
Kind Code:
A
Abstract:
To provide an electron gun capable of obtaining electron beams with high luminance and high stability used for an electron-beam equipment and a vacuum tube, especially, an electron microscope.
The cold-cathode field emission electron gun used for an electronic optical equipment operates at 1,000°C or less, and as electron emission characteristics obtained, an emission current stability is less than 5%, and an angle current density is larger than 50 μA/sr.
Inventors:
UEDA AKIHIKO
IKEDA KAZUHIRO
TATSUMI NATSUO
NISHIBAYASHI YOSHIKI
IMAI TAKAHIRO
IKEDA KAZUHIRO
TATSUMI NATSUO
NISHIBAYASHI YOSHIKI
IMAI TAKAHIRO
Application Number:
JP2009098663A
Publication Date:
November 04, 2010
Filing Date:
April 15, 2009
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
H01J37/073; H01J1/304
Attorney, Agent or Firm:
Masami Sakai
Norio Kagami
Norio Kagami