Title:
COLD CATHODE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3451048
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a highly reliable cold cathode with nanoscale tubes that may be XY-addressed and provide its manufacturing method.
SOLUTION: A field emission electron source comprises a metal substrate 7, a gate insulation layer 6 formed on the upper surface of the metal substrate, a gate electrode 14 formed over the gate insulation layer 6, a cathode electrode 13 formed beneath the metal substrate, and a lower end of electric-field emitting electron source composed of nanoscale tubes which penetrate through the metal substrate 7 and the gate insulation layer 6 and the upper end face of which is exposed on the surface of the gate insulation layer 6.
Inventors:
Hiroshi Ohki
Masao Urayama
Masao Urayama
Application Number:
JP33267599A
Publication Date:
September 29, 2003
Filing Date:
November 24, 1999
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01J9/02; H01J1/304; (IPC1-7): H01J1/304; H01J9/02
Domestic Patent References:
| JP5211030A | ||||
| JP1111917A | ||||
| JP5211029A | ||||
| JP9504900A |
Attorney, Agent or Firm:
Yuusuke Hiraki
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