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Patent Searching and Data


Title:
COMPOSITION FOR FORMING PROTECTIVE FILM AND METHOD FOR PEELING PROTECTIVE FILM
Document Type and Number:
Japanese Patent JP2010024342
Kind Code:
A
Abstract:

To provide a composition for forming protective films, giving the protective films which are excellent in protective film characteristics for protecting wafer-holding surfaces on the processing of wafers and enable to easily peel off discarded protective films without a specific wafer-washing liquid, after used, and to provide a peeling method by which the protective film can be peeled without accompanying an environmental load.

There is provided the composition for forming the protective films, characterized by containing a coating film-forming material (A) comprising at least polyvinylbutyral resin (a) and polyvinylacetoacetal resin (b), and a compound (B) represented by general formula (1) in an organic solvent.


Inventors:
UDAKA KOJUN
Application Number:
JP2008187085A
Publication Date:
February 04, 2010
Filing Date:
July 18, 2008
Export Citation:
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Assignee:
INCTEC INC
International Classes:
C09D129/14; C09D183/04; H01L21/304; H01L21/312; H01L21/683
Attorney, Agent or Firm:
Toshieko Kondo
Katsuhiro Yoshida