Title:
CONTAMINANT-MONITORING DEVICE FOR CLEAN ROOM
Document Type and Number:
Japanese Patent JP3121960
Kind Code:
B2
Abstract:
PURPOSE: To obtain a contaminant-monitoring device for a clean room, which is capable of efficiently collecting contaminants contained in the atmosphere without an influence of man-made contamination to accurately and easily monitor the degree of contamination in the clean room in a shorter period of time.
CONSTITUTION: A contaminant-monitoring device includes an outer case having a mounting space inside to mount collecting plates 4 and 5 for collecting contaminants, a suction nozzle 1 which makes the outside air strike concentratedly onto the collecting plates 4 and 5 mounted in the mounting space, an exhaust port to allow the suction nozzle 1 to suck the outside air, electric potential setting terminals 6 and 7 through which a voltage is applied to the collecting plates 4 and 5 from a direct current voltage applying device and the collecting plates 4 and 5 are kept at a specified electric potential, a contamination preventing cap 9 for transfer to cover the suction nozzle 1, and a contamination preventing cap 9 for transfer to cover the exhaust port.
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Inventors:
Takeshi Ishiguro
Toshimin Lu
Toshimin Lu
Application Number:
JP12759793A
Publication Date:
January 09, 2001
Filing Date:
May 28, 1993
Export Citation:
Assignee:
TAKENAKA CORPORATION
International Classes:
B03C3/02; F24F3/16; F24F7/06; G01N1/02; G01N15/00; G01N15/02; (IPC1-7): F24F7/06; B03C3/02; G01N1/02; G01N15/00; G01N15/02
Domestic Patent References:
| JP6154256U |
Attorney, Agent or Firm:
Furuya Fumio (1 person outside)