Title:
CONTROL DEVICE AND CONTROL METHOD FOR LINEAR MOTOR STAGE
Document Type and Number:
Japanese Patent JP2023046608
Kind Code:
A
Abstract:
To provide a control device and a control method for a linear motor stage, capable of suppressing vibration due to timing deviation of feedforward control and shortening a settling time at the time of stoppage.SOLUTION: A control device comprises a feedback control unit 6 which feedback-controls a stage 10 by PI control or PID control based on position information of a movable stage 10, and a feedforward control unit 7 which feedforward-controls the stage 10 by a preliminarily learned feedforward value. In feedforward control performed by the feedforward control unit 7, a proportional value and a differential value of feedback control are not included in a feedforward value, and an integral value of feedback control is used as a feedforward value.SELECTED DRAWING: Figure 2
Inventors:
AKAMATSU KAORU
Application Number:
JP2021155299A
Publication Date:
April 05, 2023
Filing Date:
September 24, 2021
Export Citation:
Assignee:
PROTERIAL LTD
International Classes:
G05B11/32; G03F7/20; G05B13/02; G05D3/12; H02P25/064
Attorney, Agent or Firm:
Patent Attorney Corporation Junias International Patent Office
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