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Title:
CONTROL SYSTEM OF AXIAL-FLOW PUMP DEVICE
Document Type and Number:
Japanese Patent JPH03107599
Kind Code:
A
Abstract:

PURPOSE: To control the entire body of an axial-flow pump device in an optimum condition by accurately detecting a suction force condition of the axial- flow pump, and by controlling the driving and stopping of the axial-flow pump, as well as the opening/closing of inlet/exhaust valves, and so on, based on the detected information.

CONSTITUTION: In a turbo-molecular pump 2 as an axial-flow pump, a pump load detector 5 is mounted. Based on a detection signal from the pump load detector 5, through a controller 6 of the turbo-molecular pump 2 as well as main controller 7 of an axial-flow pump device, a valve 1 on the suction force side and a valve 3 on the exhaust force side are controlled, respectively. When the ultra vacuum pressure exceeds, for example, a set value, the turbo-molecular pump 2 is temporarily stopped by the controller 6, and the valve 1 on the suction force side is closed. So as to meet the ultra vacuum condition controlled by the controller 6, a front stage pump 4 is controlled by the main controller 7.


Inventors:
OZAKI TAKAMI
Application Number:
JP24604789A
Publication Date:
May 07, 1991
Filing Date:
September 20, 1989
Export Citation:
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Assignee:
NTN TOYO BEARING CO LTD
International Classes:
F04D27/00; F04D19/04; (IPC1-7): F04D19/04; F04D27/00
Domestic Patent References:
JPS5956406A1984-03-31
JPS60190696A1985-09-28
JPS63176694A1988-07-20
JPS60128996A1985-07-10
JPS56163013A1981-12-15
Attorney, Agent or Firm:
Bunji Kamata (2 outside)