Title:
制御システム、制御方法、制御プログラム、および処理システム
Document Type and Number:
Japanese Patent JP7442305
Kind Code:
B2
Abstract:
A control system includes: a specifying part for specifying a model corresponding to a processing apparatus and a control algorithm that generates a control signal for controlling the processing apparatus; a simulator for simulating the state of the processing apparatus with the model; a first control signal generation part for generating a control signal based on the measurement value by using the control algorithm; a second control signal generation part for generating a control signal based on an output value of the simulator by using the control algorithm; a first adjustment part for adjusting a value of a model parameter included in the model; and a second adjustment part for adjusting a value of a control parameter included in the control algorithm so that an evaluation value calculated for the output value of the simulator becomes closer to a target value.
Inventors:
Ryuta Higuchi
Application Number:
JP2019213379A
Publication Date:
March 04, 2024
Filing Date:
November 26, 2019
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/52; G05B11/36
Domestic Patent References:
| JP2009152269A | ||||
| JP2003017471A | ||||
| JP2011082441A | ||||
| JP2000517472A |
Foreign References:
| US20130116802 | ||||
| US20140107993 | ||||
| WO2018052698A1 | ||||
| WO2012001213A1 |
Attorney, Agent or Firm:
Sakai International Patent Office
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