Title:
CONTROL UNIT, SYSTEM, LITHOGRAPHY DEVICE, METHOD FOR MANUFACTURING ARTICLE, CONTROL METHOD, AND PROGRAM
Document Type and Number:
Japanese Patent JP2022108621
Kind Code:
A
Abstract:
To provide a technique advantageous for actuating, without delay, a system that performs transmission and reception of data between a master device and a slave device.SOLUTION: There is provided a control unit that controls a slave device connected via a network, and the control unit has: a generation unit that generates instruction data for controlling the slave device; a communication unit that transmits and receives a data frame including the instruction data generated by the generation unit or a response data from the slave device for every constant period via the network; and a processing unit that, when the response data indicates an abnormality in a unit controlled by the slave device, acquires and outputs abnormality data included in the plurality of data frames received by the communication unit in a divided manner and indicating information on the abnormality in the unit.SELECTED DRAWING: Figure 1
Inventors:
WATANABE YASUHIRO
Application Number:
JP2021003724A
Publication Date:
July 26, 2022
Filing Date:
January 13, 2021
Export Citation:
Assignee:
CANON KK
International Classes:
H04L12/28
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office