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Title:
CONVEYING DEVICE FOR FLAT PLATE-LIKE MEMBER
Document Type and Number:
Japanese Patent JP2010126319
Kind Code:
A
Abstract:

To provide a conveying device capable of stably conveying a flat plate-like member while suppressing deformation.

The conveying device for a glass substrate 90 includes: a chuck device 50 for grasping the upper part of the glass substrate 90 so as to hang down the glass substrate 90; fluid support devices 40a, 40b which are formed so as to be extended along a linear conveying route and support a lower part of the glass substrate 90 grasped so as to be hung down by the chuck device 50, from both surfaces at non-contact; and an electric slider 30 for moving the chuck device 50 along the conveying route such that the lower part of the glass substrate 90 is maintained in the state that it is supported by the fluid support devices 40a, 40b.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
ITO MASA
NAKAYAMA KANICHIRO
Application Number:
JP2008303869A
Publication Date:
June 10, 2010
Filing Date:
November 28, 2008
Export Citation:
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Assignee:
CKD CORP
International Classes:
B65G49/06; B65G47/90; B65G51/03
Domestic Patent References:
JPH0536658A1993-02-12
JPH11246046A1999-09-14
JP2002310639A2002-10-23
JPH107246A1998-01-13
JP2007238288A2007-09-20
Attorney, Agent or Firm:
Tsuyoshi Yamada