To provide a conveying device capable of stably conveying a flat plate-like member while suppressing deformation.
The conveying device for a glass substrate 90 includes: a chuck device 50 for grasping the upper part of the glass substrate 90 so as to hang down the glass substrate 90; fluid support devices 40a, 40b which are formed so as to be extended along a linear conveying route and support a lower part of the glass substrate 90 grasped so as to be hung down by the chuck device 50, from both surfaces at non-contact; and an electric slider 30 for moving the chuck device 50 along the conveying route such that the lower part of the glass substrate 90 is maintained in the state that it is supported by the fluid support devices 40a, 40b.
COPYRIGHT: (C)2010,JPO&INPIT
JP2005095935 | DEVICE OF PRODUCING SOLAR BATTERY ELEMENT |
JP6674151 | Glass substrate manufacturing method |
JP2006337945 | CORRECTION SYSTEM |
NAKAYAMA KANICHIRO
JPH0536658A | 1993-02-12 | |||
JPH11246046A | 1999-09-14 | |||
JP2002310639A | 2002-10-23 | |||
JPH107246A | 1998-01-13 | |||
JP2007238288A | 2007-09-20 |
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