Title:
Cutting apparatus
Document Type and Number:
Japanese Patent JP6108999
Kind Code:
B2
Abstract:
A cutting unit includes a spindle, a spindle housing, a support flange on the front of the spindle, a cutting blade detachably supported to the support flange, and a fixing flange for fixing the cutting blade to the support flange. The support flange includes a boss portion adapted to be inserted through a central opening of the cutting blade, a flange portion for supporting one side surface of the cutting blade, and a cylindrical portion for engaging the front of the spindle. The flange portion has a suction hole opening toward the fixing flange, and the cylindrical portion has a communication hole communicating with the suction hole. The communication hole is connected to a vacuum source through a rotary joint fixed to the spindle housing so that communication between the communication hole and the vacuum source is selectively made by an on-off valve.
More Like This:
Inventors:
Nobuhiko Wakita
Application Number:
JP2013149697A
Publication Date:
April 05, 2017
Filing Date:
July 18, 2013
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B45/00
Domestic Patent References:
| JP2002154054A | ||||
| JP63256357A | ||||
| JP11033907A | ||||
| JP2008000819A | ||||
| JP2007030114A | ||||
| JP2005014128A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto