Title:
CUTTING DEVICE AND JIG
Document Type and Number:
Japanese Patent JP2022178898
Kind Code:
A
Abstract:
To provide a cutting device that facilitates arranging a rotational angle sensor of an unbalance detector at a detection position.SOLUTION: A cutting device used for cutting work of a workpiece includes: a chuck table for holding the workpiece; a spindle having a mount attached to a tip portion thereof, the mount allowing an annular cutting blade to be fixed thereto; a blade cover that covers a part of the cutting blade fixed to the mount; and an unbalance detector for detecting unbalance during rotation caused by a misalignment between a rotary shaft of a spindle and the center of gravity of the cutting blade. The unbalance detector includes a rotational angle sensor for detecting a change in angle caused by rotation of the spindle. The rotational angle sensor is installed on the blade cover to be thereby arranged at a detection position where the sensor can detect a change in angle caused by rotation of the spindle.SELECTED DRAWING: Figure 8
Inventors:
TAKADA SHINSAKU
Application Number:
JP2021086010A
Publication Date:
December 02, 2022
Filing Date:
May 21, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B49/12; B23Q11/00; B23Q17/12; B24B27/06; B24B45/00; G01M1/16; H01L21/301
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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