Title:
CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2022006509
Kind Code:
A
Abstract:
To provide a cutting device, which can perform inspection of whether a shape of a support surface of a mount supporting a cutting blade needs to be corrected or not and whether the shape has been properly corrected or not, without bringing a jig into contact with the support surface.SOLUTION: The cutting device comprises: a shape memorizing part 84 that sets and memorizes a cross sectional shape in an axial direction of a spindle of a support surface; shape measuring means 83 that measures the cross sectional shape in the axial direction of the spindle of the support surface in a non-contact manner; a determining part 85 that determines whether the support surface needs to be corrected or not by comparing the memorized cross sectional shape memorized in the shape memorizing part 84 with the measured cross sectional shape measured by the shape measuring means 83; and end face correcting means 80 that corrects the shape of the support surface. The end face correcting means 80 comprises: a correcting-grindstone 81 that can come into contact with the support surface; a tip detecting part 82 that detects a tip of the correcting-grindstone; and a movement control part 86 that moves the correcting-grindstone 81 and the support surface relatively in a direction parallel to the support surface, while keeping the tip of the correcting-grindstone 81 in contact with the support surface.SELECTED DRAWING: Figure 1
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Inventors:
TAKEDA SHUN
Application Number:
JP2020108765A
Publication Date:
January 13, 2022
Filing Date:
June 24, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B45/00; B24B7/00; B24B27/06; B24B49/10; B24B49/12; H01L21/301
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office