Title:
切削装置及びウエーハの加工方法
Document Type and Number:
Japanese Patent JP6462422
Kind Code:
B2
Inventors:
Kenji Takenouchi
Application Number:
JP2015041177A
Publication Date:
January 30, 2019
Filing Date:
March 03, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B55/02
Domestic Patent References:
| JP2013111713A | ||||
| JP2004082038A | ||||
| JP2014037052A | ||||
| JP2012015293A | ||||
| JP2009099609A |
Foreign References:
| WO2007007683A1 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office
Kyoko Kawamura
Isao Sasaki
Ken Kubo
Kyoko Kawamura
Isao Sasaki
Ken Kubo