Title:
切削装置
Document Type and Number:
Japanese Patent JP6855123
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a cutting device which does not require complicated work in correcting an end surface of a mount flange.SOLUTION: A cutting device includes: a chuck table which holds a workpiece unit structured by supporting a workpiece by an adhesive tape stuck on an opening of an annular frame; a cutting unit which has a cutting blade attached to a mount flange fixed on a tip end of a spindle, and cuts the workpiece held by the chuck table; and a moving unit which relatively moves the chuck table and the cutting unit. The chuck table includes a main body part which has a holding surface for holding the workpiece through the adhesive tape, a frame fixing part which fixes the frame on an outer side than an outer peripheral edge of the main body part, and an end surface correcting part which is arranged on the frame fixing part and detachably fixes a polishing stone for polishing an end surface contacting with the cutting blade of the mount flange.SELECTED DRAWING: Figure 1
Inventors:
Yagihara Atsushi
Kenta Nakamura
Kenta Nakamura
Application Number:
JP2017090059A
Publication Date:
April 07, 2021
Filing Date:
April 28, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B9/00; B24B19/00; B24B27/06; B24B45/00; H01L21/301
Domestic Patent References:
| JP2011009324A | ||||
| JP2016179520A | ||||
| JP2011224666A | ||||
| JP8339977A | ||||
| JP2017019043A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro