Title:
CVD COATING SYSTEM
Document Type and Number:
Japanese Patent JP2004003027
Kind Code:
A
Abstract:
To enable economical and advantageous CVD (Chemical Vapor Deposition) coating for a long coating time.
In the system wherein at least two parts are received at least in one coating equipment, the CVD coating system includes a conveyer means, at least one coating equipment for applying coating to the parts, at least one exhaust means, and a means for producing plasma in at least one small region of the coating equipment.
Inventors:
ARNOLD GREGOR
BEHLE STEPHAN
LUTTRINGHAUS-HENKEL ANDREAS
BICKER MATTHIAS
BEHLE STEPHAN
LUTTRINGHAUS-HENKEL ANDREAS
BICKER MATTHIAS
Application Number:
JP2003147769A
Publication Date:
January 08, 2004
Filing Date:
May 26, 2003
Export Citation:
Assignee:
ZEISS STIFTUNG
International Classes:
B08B7/00; B08B9/42; B29C49/42; B65D23/02; B65G29/00; C03C17/00; C08J9/00; C23C14/04; C23C14/50; C23C14/56; C23C16/04; C23C16/40; C23C16/44; C23C16/455; C23C16/458; C23C16/50; C23C16/511; C23C16/54; B05D7/24; (IPC1-7): C23C16/54
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
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