Title:
DEAERATION DEVICE FOR TREATING LIQUID SUPPLY DEVICE
Document Type and Number:
Japanese Patent JP3386946
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent a particle from being generated at a joined part and a metal ion from being precipitated in a treating liquid by forming each of joints for piping for the supply of a treating liquid in a resin material, and firmly fixing each of the joints to a vacuum chamber by welding or adhesion.
SOLUTION: A vacuum chamber 12 is composed of a cylindrical barrel part 20 and a pair of right/left caps 22, 22. The cylindrical barrel part 20 is, for example, formed of polyolefin resin and the cap 22 of polytetrafluoroethylene. A joint 14 is formed of a non-corrodible resin, e.g. fluororesin, and has an internally formed a passageway 28 for a treating liquid. In addition, the connecting end part of piping for the supply of the treating liquid is connected to the passageway 28 in mutually communicating manner. The tip part of the joint 14 is hermetically fitted into an opening part formed in the central part of the cap 22 of the vacuum chamber 12, and is firmly fixed to the cap 22 by welding or an adhesive.
Inventors:
Toyohide Hayashi
Yuki Iwami
Yuki Iwami
Application Number:
JP33823495A
Publication Date:
March 17, 2003
Filing Date:
November 30, 1995
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B01D19/00; B01D63/00; C02F1/20; (IPC1-7): B01D19/00; B01D63/00; C02F1/20
Domestic Patent References:
| JP557152A | ||||
| JP764250A | ||||
| JP316605A |
Attorney, Agent or Firm:
Takeo Mamiya
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