To surely prevent the adhesion of debris to an X-ray optical system, keep X-ray transmittance high by forming a filter into a thin film, and easily replace the filter to which a debris has adhered with a new one without restoring the pressure of a vacuum chamber to normal pressure.
This device is provided with a shielding part comprising a frame-like substrate 51 having an opening part, and a filter at least covering the opening of the opening part, capable of transmitting an X-ray and blocking the passage of scattering particles. The filter is composed of a silicon nitride film 53 having a thickness of 0.05-0.2 μm, and a reinforcing film 54 formed on the surface of the silicon nitride film 53 for reinforcing the silicon nitride film 53. Since the silicon nitride film 53 is reinforced by the substrate 51 and the reinforcing film 54 of the thin film, its strength is improved while keeping X-ray transmittance high.
MASE AKIRA
MATSUBARA KYOJI
AZUMA HIROZUMI
TOYOTA MOTOR CORP
TOYOTA CENTRAL RES & DEV
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