Title:
欠陥検査装置、欠陥検査方法、及びそのプログラム
Document Type and Number:
Japanese Patent JP7015001
Kind Code:
B2
Abstract:
An image generating part (156) generating feature extraction images by applying an identification part, which has completed learning, that has executed learning in advance to extract features using learning image data to an inspection image, an inspection part (170) specifying an area corresponding to a defect based on judgment parameters (136) for judging presence/absence of a defect in the inspection target object and a binary image generated based on the feature extraction images, and a setting part (166) calculating an image score based on a density of a color of pixels of a setting image using the setting image that is the binary image in which an area corresponding to the defect is specified and updating the judgment parameters (136) such that a difference between an image score of the inside of the area and an image score of the outside of the area becomes relatively large are included.
Inventors:
Yasuyuki Ikeda
Masatsugu Kurita
Masatsugu Kurita
Application Number:
JP2018046534A
Publication Date:
February 02, 2022
Filing Date:
March 14, 2018
Export Citation:
Assignee:
OMRON Corporation
International Classes:
G06T7/00; G01N21/88
Domestic Patent References:
| JP9179985A | ||||
| JP2018005639A | ||||
| JP2006293528A | ||||
| JP2006090921A | ||||
| JP2008175588A | ||||
| JP2187652A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Kentaro Ito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Kentaro Ito
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