Title:
金属酸化膜の蒸着方法及びプラズマディスプレイパネルの製造方法
Document Type and Number:
Japanese Patent JP5715096
Kind Code:
B2
Inventors:
Eiichi Iijima
Muneto Hakomori
Takanobu Yano
Muneto Hakomori
Takanobu Yano
Application Number:
JP2012157226A
Publication Date:
May 07, 2015
Filing Date:
July 13, 2012
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/30; C23C14/08; H01J9/02; H01J11/12; H01J11/40
Domestic Patent References:
| JP7003440A | ||||
| JP8134644A | ||||
| JP5339719A | ||||
| JP7011429A | ||||
| JP62207860A | ||||
| JP2007048648A | ||||
| JP64037458U | ||||
| JP2004315971A | ||||
| JP2002146518A | ||||
| JP10140336A | ||||
| JP8013139A | ||||
| JP3283338A | ||||
| JP3188269A |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Ori Akira