ＭＥＭＳ加速度センサチップの検出方法及び装置

Japanese Patent JP7221453

B2

A method and apparatus for checking a MEMS acceleration sensor chip, the method comprising: applying a variable direct current voltage and an alternating current voltage of a preset frequency to a first electrode plate and a second electrode plate of a MEMS acceleration sensor chip to obtain a base capacitance value and a voltage-applied capacitance value between the first electrode plate and the second electrode plate (101, 102); on the basis of the obtained base capacitance value and the voltage-applied capacitance value, determining a breakover voltage, a capacitance change value, and a C-V characteristic curve (103); and on the basis of the base capacitance value, the breakover voltage, the capacitance change value, and the C-V characteristic curve of the first electrode plate and the second electrode plate, determining whether the MEMS acceleration sensor chip is normal (104). The invention is used to solve the existing technical problem that when a MEMS acceleration sensor chip has finished being processed, it cannot be preliminarily determined whether the MEMS acceleration sensor chip is normal, thus achieving checking of MEMS acceleration sensor chips after completion of processing, greatly saving costs.

劉▲じん▼
Feng Fang
Lee Zong Wei
Yang Changchun
Ken Shuei

JP2022533625A

February 13, 2023

May 19, 2021

Click for automatic bibliography generation  

INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES

G01P21/00; H01L21/66

CN109341744A
CN105259372A
CN104977473A
CN103837706A
US20060219536

Sonoda & Kobayashi Patent Attorneys Corporation

Previous Patent: In-vehicle equipment and deterioration determination method

Next Patent: MANUFACTURE OF LAMINATED CERAMIC PACKAGE