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Title:
DETERGENT COMPOSITION
Document Type and Number:
Japanese Patent JP2009029849
Kind Code:
A
Abstract:

To provide a detergent composition having excellent pitting corrosion-preventing effects to a metal wiring material, especially a detergent composition having excellent properties for separating and removing a photoresist, and excellent corrosion-resisting properties and pitting corrosion-preventing effects to the metal wiring material.

The detergent composition usable in a production process of a semiconductor integrated circuit or a liquid crystal display comprises (A) at least one kind of hydrofluoric acid and a hydrofluoric acid salt, (B) at least one kind of a sulfite and a disulfite, and (C) water.


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Inventors:
OI YOSUKE
TAKEI MIZUKI
NISHIJIMA YOSHITAKA
Application Number:
JP2007192565A
Publication Date:
February 12, 2009
Filing Date:
July 24, 2007
Export Citation:
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Assignee:
NAGASE CHEMTEX CORP
International Classes:
C11D7/08; C11D7/10; C11D7/50; H01L21/027; H01L21/304; H01L21/3205; H01L21/3213; H01L23/52
Domestic Patent References:
JP2007503115A2007-02-15
JP2004325918A2004-11-18
JP2003017458A2003-01-17
JP2005294377A2005-10-20
JP2004094203A2004-03-25
Attorney, Agent or Firm:
Shinya Furuya



 
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