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Title:
DEVELOPMENT APPARATUS
Document Type and Number:
Japanese Patent JP3945569
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To recover developing solution in a short time so as to give less opportunity to contact with air.
SOLUTION: A cup 3 is provided, in the inside of a side wall 7, with a skirt- like rectifier ring 25 that spreads toward the bottom through a support piece 23. The lower end of the ring 25 confronts with a developing solution recovery pocket 26 whose plan view has an annular shape and cross section has a shape of gutter. Further the bottom surface of the pocket 26 is inclined toward one direction, and the lowest, point of the inclination is connected with a tube 27. When a pump 28 is driven, the developing solution in the pocket 26 is collected to a tank or the like.


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Inventors:
Tadashi Shimai
Application Number:
JP2001372171A
Publication Date:
July 18, 2007
Filing Date:
December 06, 2001
Export Citation:
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Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/30; H01L21/027; (IPC1-7): H01L21/027; G03F7/30
Domestic Patent References:
JP10172950A
JP11305450A
JP10321517A
Attorney, Agent or Firm:
Yu Koyama



 
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