Title:
DEVICE FOR EMITTING ULTRAVIOLET RAY, DEVICE FOR PROCESSING SUBSTRATE, AND METHOD OF EMITTING ULTRAVIOLET RAYS
Document Type and Number:
Japanese Patent JP2022053342
Kind Code:
A
Abstract:
To provide a technique for efficiently emitting ultraviolet rays for processing a substrate.SOLUTION: A device includes: a discharge chamber that is provided with an electrode substrate and a translucent plate that transmits and emits ultraviolet rays, which are arranged so as to face each other across a discharge space filled with gas for plasma conversion by discharge; two base electrodes that are provided on a plate surface of the electrode substrate to supply electric power for converting the gas into plasma and are formed in a band shape extending side by side with each other; a comb tooth electrode portion in which a plurality of first tooth electrodes connected to one of the base electrodes and linearly formed so as to extend toward the other base electrode, and a plurality of second tooth electrodes connected to the other base electrode and linearly formed so as to extend toward the one base electrode are lined up along the extending direction of the base electrode; a dielectric portion provided between the discharge space and the comb tooth electrode portion provided on the electrode substrate; and a power supply portion that supplies power to the comb tooth electrode portion.SELECTED DRAWING: Figure 4
Inventors:
IIZUKA YASHIRO
Application Number:
JP2020160134A
Publication Date:
April 05, 2022
Filing Date:
September 24, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01J65/00; C23C16/48; H01J11/32; H01J11/38; H01J61/30; H01L21/31; H01L21/318
Attorney, Agent or Firm:
Patent Corporation Yayoi Patent Office
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