To provide a discharge plasma treating method which is able to realize a stable discharging state under the condition of atmospheric pressure and to be conducted with simple equipment and a small amt. of gas for treatment.

A solid dielectric vessel 4 provided with a gas blow-off port 7 is arranged at a negative electrode 2, the other electrode 3 is provided opposite to the gas blow-off port 7, a substrate 5 is arranged on the space between the gas blow-off port and the other electrode 3, the treating gas is continuously exhausted from the gas blow-off port, and simultaneously, to the space between the negative electrode 2 and the other electrode 3, the pulse electric field in which the rising time and falling time are regulated to 40ns to 100μs and the electric field strength is regulated to 1 to 100kV/cm is applied to generate discharge plasma.